Autonomous Vibrationless Temperature-Controlled Cryosystem for Optical Studies with a Spectroscopic Ellipsometer

I. ZHARKOV; V. SAFRONOV; V. KHODUNOV; V. KONOVAL; I. PALAMARCHUK; O. SELIVANOV; A. SOLONETSKY; S. MAMYKIN; O. YASTRUBCHAK; V. ROMANYUK

doi:10.15407/scine20.06.018

Authors

I. ZHARKOV Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0003-1626-5655
V. SAFRONOV Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0002-2982-9627
V. KHODUNOV Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0002-5881-5080
V. KONOVAL Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0002-5240-1207
I. PALAMARCHUK Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0003-4513-9850
O. SELIVANOV Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0001-9579-885X
A. SOLONETSKY Institute of Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0001-8837-4776
S. MAMYKIN Lashkaryov Institute of Semiconductor Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0002-9427-324X
O. YASTRUBCHAK Lashkaryov Institute of Semiconductor Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0001-6641-5768
V. ROMANYUK Lashkaryov Institute of Semiconductor Physics of the National Academy of Science of Ukraine https://orcid.org/0000-0002-0068-5973

DOI:

https://doi.org/10.15407/scine20.06.018

Keywords:

Thermoregulated nitrogen cryosystem;, spectroscopic ellipsometry;, semiconductor structures;, optical constants temperature dependencies

Abstract

Introduction. Ellipsometry is a highly sensitive, non-destructive optical method used to study the optical and structural properties of materials and thin films.
Problem Statement. At the Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine, the first in Ukraine serial spectroscopic ellipsometer SE-2000 (manufactured by SEMILAB Ltd., Hungary) has been employed for research, but its measurement capabilities are currently limited to room temperature.
Purpose. This research aims to expand the functionality of the SE-2000 by creating a temperature-controlled cryosystem that operates within a temperature range from –195 ^оC to +80 ^оC (approximately 80—353 K).
Materials and Methods. An autonomous, precision, vibrationless, cryosystem has been designed and manufactured for low-temperature optical investigations in reflection mode, based on a gas-flow cryostat. The cryosystem includes a cryostat, a microprocessor temperature controller, and an adjustment table.
Results. The cryostat operates on a gas-flow principle. A laminar gas flow is generated by excess pressure achieved through the heating of cryogenic liquid by a heater-evaporator in the feeder tank. The flow intensity is regulated by adjusting the power supplied to the heating element, eliminating vibrations in the cryostat and sample. The heat exchange chamber is positioned at the top of the nitrogen tank, with the test sample mounted in horizontal plane. Incident and reflected light beams interact with the sample from the upper hemisphere. Sample positioning is adjustable via translational motion along three Cartesian coordinates and by tilting the cryostat with the help of the adjustment table.
Conclusions. This system is suitable for use in optical devices that operate in specular reflection mode, with access to the sample surface from the upper hemisphere.

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