Humidity Diode Sensors Based on 1D Nanosized Silicon Structures

Authors

DOI:

https://doi.org/10.15407/scine20.03.067

Keywords:

metal-assisted chemical etching, silicon nanowires, 1D nanostructures, silicon diode, humidity sensors

Abstract

Introduction. Humidity measurement is essential in microelectronics, aerospace, biomedical, and food industries, as well as in households for climate control. Currently, various types of devices have been used as humidity sensors: capacitive, resistive, diode, gravimetric, optical structures, field-effect transistors and devices based on surface acoustic waves.
Problem Statement. Today, there is a need to develop IC-compatible humidity sensors that have high sensitivity
and low cost. To this end, silicon nanowires have been successfully used in resistive and capacitive humidity sensors. However, there is a lack of research on the nanowire effect on device parameters of diode-type humidity sensors.
Purpose. To develop diode sensors based on silicon nanowires and to determine the effect of process parameters of synthesis and structural features of nanowires on the performance of humidity sensors.
Materials and Methods. The process of sensor fabrication includes several steps: chemical cleaning of silicon wafer, synthesis of silicon nanowires using standard or modified metal-assisted chemical etching, phosphorus diffusion to create a p-n junction, front and back metallization. The surface morphology of the nanostructures has been studied by scanning electron microscopy. The humidity-sensitive characteristics have been studied with the
use of salt hygrostats.
Results. It has been shown that the addition of one-dimensional silicon nanostructures to the diode-type sensor signifi cantly improves its characteristics. The rectification ratio increases from 161 to 1807, the response ups from 4.5 to 25, the sensitivity grows from 1.6 to 4.02 (%RH)–1, while the response time and recovery time are reduced from 85/90 to 25/30 s, the hysteresis value goes down from 75 to 16%, the signal deviation after cycling drops from 15
to 3%, and the signal fluctuation during continuous device operation decreases from 17 to 15%.
Conclusions. The results have shown that the use of a simple and cheap nanowire synthesis technology is effective to produce humidity sensors.

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References

Pan, S., Gayathri, T., Reshma, T., Mang, S. (2022). A sensitive humidity sensor at low pressure with SnO2 . Sensors and Actuators A: Physical, 346, 113835. https://doi.org/10.1016/j.sna.2022.113835.

Nikulicheva, T. B., Zakhvalinskii, V. S., Pilyuk, E. A., Nikulin, I. S., Vyazmin, V. V., Mishunin, M. V. (2023). New humi dity sensor material (CaSO4 ⋅ 2H2 O) 0.975-(CuSO4 ⋅ 5H2 O) 0.025. Materialia, 27, 101662. https://doi.org/10.1016/j.mtla.2022.101662 .

Zheng, F., Li, M., Li, C., Zhou, B., Xuan, X., Li, H. (2022). Wireless surface acoustic wave humidity sensor with chitosan/ porous cyclodextrin — TiO2 composites for monitoring air and human respiration. Sensors and Actuators B: Chemical, 379, 133235. https://doi.org/10.1016/j.snb.2022.133235.

Fang, H., Lin, J., Hu, Z., Liu, H., Tang, Z., Shi, T., Liao, G. (2020). Cu(OH)2 nanowires/graphene oxide composites based QCM humidity sensor with fast-response for real-time respiration monitoring. Sensors and Actuators B: Chemical, 304, 127313. https://doi.org/10.1016/j.snb.2019.127313.

Zhao, Y., Yang, B., Liu, J. (2018). Eff ect of interdigital electrode gap on the performance of SnO2 — modifi ed MoS2 capacitive humidity sensor. Sensors and Actuators B: Chemical, 271, 256—263. https://doi.org/10.1016/j.snb.2018.05.084.

Lu, Y., Xu, K., Yang, M. Q., Tang, S. Y., Yang, T. Y., Fujita, Y., Takei, K. (2021). Highly stable Pd/HNb3 O8 -based fl exible humidity sensor for perdurable wireless wearable applications. Nanoscale Horiz, 6, 260—270. https://doi.org/10.1039/D0NH00594K .

Karrevula, V. R., Prasad, A. K., Mishra, V., Tripurasundari, S. (2022). Eff ect of pre-adsorbed moisture and humidity on I—V characteristics of Si PIN diode. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectro meters, Detectors and Associated Equipment, 1047, 167832. https://doi.org/10.1016/j.nima.2022.167832 .

Zhao, X., Chen, X., Liu, F., Ding, X., Yu, X., Tang, K., Li, G. (2022). An ultrafast QCM humidity sensor for respiratory monitoring outside a mask. Sensors and Actuators B: Chemical, 371, 132396. https://doi.org/10.1016/j.snb.2022.132396.

Liu, Y., Gong, H., Lu, X., Ni, K., Zhao, C., Shen, C. (2023). Optical fi ber humidity sensor based on vernier eff ect of Fab ry-Perot interferometers with microsphere. Optical Fiber Technology, 76, 103222. https://doi.org/10.1016/j.yofte.2023.103222.

Shin, Jongmin, Hong, Y., Wu, M., Bae, J. H., Kwon, H. I., Park, B. G., Lee, J. H. (2018). An accurate and stable humidity sensing characteristic of Si FET-type humidity sensor with MoS2 as a sensing layer by pulse measurement. Sensors and Actuators B: Chemical, 258, 574—579. https://doi.org/10.1016/j.snb.2017.11.132.

Li, X., Tan, Q., Qin, L., Zhang, L., Liang, X., Yan, X. (2022). A high-sensitivity MoS2/graphene oxide nanocomposite humidity sensor based on surface acoustic wave. Sensors and Actuators A: Physical, 341, 113573. https://doi.org/10.1016/j.sna.2022.113573 .

Dusheiko, M. G., Koval, V. M., Obukhova, T. Y. (2022). Silicon nanowire arrays synthesized using the modifi ed MACE process: Integration into chemical sensors and solar cells. Semiconductor Physics, Quantum Electronics & Optoelectronics, 25, 1, 058—067. https://doi.org/10.15407.SPQEO25.01.058

Hou, H., Shao, G., Yang, W., Wong, W. Y. (2020). One-dimensional mesoporous inorganic nanostructures and their applications in energy, sensor, catalysis and adsorption. Progress in Materials Scienc., 113, 100671. https://doi.org/10.1016/j.pmatsci.2020.100671.

Hou, H., Shang, M., Wang, L., Li, W., Tang, B., Yang, W. (2015). Effi cient photocatalytic activities of TiO2 hollow fi bers with mixed phases and mesoporous walls. Sci. Rep., 5, 15228. https://doi.org/10.1038/srep15228 .

Ren, X., Hou, H., Liu, Z., Gao, F., Zheng, J., Wang, L., Wu, T. (2016). Shape-enhanced photocatalytic activities of thoroug hly mesoporous ZnO nanofi bers. Small, 12, 4007—4017. https://doi.org/10.1002/smll.201600991.

Hou, H., Shang, M., Gao, F., Wang, L., Liu, Q., Zheng, J., Yang, W. (2016). Highly effi cient photocatalytic hydrogen evolution in ternary hybrid TiO2 /CuO/Cu thoroughly mesoporous nanofi bers. ACS Appl Mater Interfaces, 8, 20128—20137. https://doi.org/10.1021/acsami.6b06644.

Naidonov, A., Koval, V., Barbash, V., Dusheiko, M., Yashchenko, O., Yakymenko, O. (2022). Nanocellulose-Based Biodeg radable Bend Sensors. IEEE 41st International Conference on Electronics and Nanotechnology: “ELNANO”, (10—14 Oc tober 2022, Kyiv), 292—297. https://doi.org/10.1109/ELNANO54667.2022.9927070 .

Shang, M., Hou, H., Gao, F., Wang, L., Yang, W. (2017). Mesoporous Ag@TiO2 nanofi bers and their photocatalytic activity for hydrogen evolution. RSC Adv, 7, 30051—30059. https://doi.org/10.1039/C7RA03177G .

Hou, H., Gao, F., Wang, L., Shang, M., Yang, Z., Zheng, J., Yang, W. (2016). Superior thoroughly mesoporous ternary hybrid photocatalysts of TiO2 /WO3 /g-C3 N4 nanofi bers for visible-light-driven hydrogen evolution. J. Mater. Chem. A, 4, 6276—6281. https://doi.org/10.1039/C6TA02307J.

Linevych, Y., Koval, V., Dusheiko, M., Yakymenko, Y., Lakyda, M., Barbash, V. (2022). Silicon Diode Structures Based on Nanowires for Temperature Sensing Applicatio. IEEE 42th International Conference on Electronics and Nanotechnology: “ELNANO”, (10—14 October 2022, Kyiv), 190—195. https://doi.org/10.1109/ELNANO54667.2022.9927122

Ahmed, N., Bhargav, P. B., Rayerfrancis, A., Chandra, B., Ramasamy, P. (2018). Study the eff ect of plasma power density and gold catalyst thickness on Silicon Nanowires growth by Plasma Enhanced Chemical Vapour Deposition. Materials Letters, 219, 127—130. https://doi.org/10.1016/j.matlet.2018.02.086.

Deepu, B. R., Anil, S. M., Savitha, P., Basavaraju, Y. B. (2020). Advanced VLS growth of gold encrusted silicon nanowires Mediated by porous Aluminium Oxide template. Vacuum, 185, 109991. https://doi.org/10.1016/j.vacuum.2020.109991.

Xi, Y., Zhang, W., Fan, Z., Ma, Q., Wang, S., Ma, D., Zhang, Y. (2018). A facile synthesis of silicon nanowires/micropillars structure using lithography and metal-assisted chemical etching method. Journal of Solid State Chemistry, 258, 181—190. https://doi.org/10.1016/j.jssc.2017.07.034.

Koval, V., Yakymenko, Y., Ivashchuk, A., Dusheyko, M., Masalskyi, O., Koliada, M., Kulish, D. (2019). Metal-Assisted Chemical Etching of Silicon for Photovoltaic Application. IEEE 39th International Conference on Electronics and Nanotechnology: “ELNANO”, (16—18 April 2022, Kyiv), 282—287. https://doi.org/10.1109/ELNANO.2019.8783506

Chen, Xuejiao, Zhang, Jian, Wang, Zhiliang, Yan, Qiang, Hui, Shichao. (2011). Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modifi cation. Sensors and Actuators B: Chemical, 156.2, 631—636. https://doi.org/10.1016/j.snb.2011.02.009

Chen, X., Zhang, J., Wang, Z., Yan, Q., Hui, S. (2008). Investigation of capacitive humidity sensing behavior of silicon nanowires. Physica E: Low-dimensional Systems and Nanostructures, 41.4, 600—604. https://doi.org/10.1016/j.physe. 2008.10.016.

Barillaro, G., Diligenti, A., Strambini, L. M., Comini, E., Faglia, G. (2008). NO2 adsorption eff ects on p+-n silicon junctions surrounded by a porous layer. Sensors and Actuators B: Chemical, 134(2), 922—927. https://doi.org/10.1016/j.snb.2008.06.048 .

Tao, B., Zhang, J., Miao, F., Li, H., Wan, L., Wang, Y. (2008). Capacitive humidity sensors based on Ni/SiNWs nanocomposites. Sensors and Actuators B: Chemical, 136.1, 144—150. https://doi.org/10.1016/j.snb.2008.10.039.

Hsueh, H. T., Hsueh, T. J., Chang, S. J., Hung, F. Y., Tsai, T. Y., Weng, W. Y., Dai, B. T. (2011). CuO nanowire-based humidity sensors prepared on glass substrate. Sensors and Actuators B: Chemical, 156.2, 906—911. https://doi.org/10.1016/j.snb.2011.03.004 .

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Published

2024-05-08

How to Cite

LINEVYCH, Y., KOVAL, V., DUSHEІKO M., & LAKYDA, M. (2024). Humidity Diode Sensors Based on 1D Nanosized Silicon Structures. Science and Innovation, 20(3), 67–81. https://doi.org/10.15407/scine20.03.067

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Section

The Scientific Basis of Innovation