1Niemova, SV
1INTERO Ltd., Kyiv
Sci. innov. 2014, 10(2):50-54
https://doi.org/10.15407/scine10.02.050
Section: The World of Innovations
Language: English
Abstract: 

The research deals with new Leica Microsystems desktop coaters used for application of conductive layers in vacuum. Their technical specifications and scope of application have been described.

Keywords: automatic control, electron microscopy, microstructure analysis, nanotechnology, replica, vacuum level